Silicon ingot, rod, piece, tube, ring
Cylinder, Plane
Discrete Device
High Purity Silicon
Wooden Box Vacuum
Product Description
1.Our sputtering targets mainly consist of pure metals and alloys, available in both planar and rotatable shapes.
Featured targets from Rhexon:
1.Pure Metal:
Ti, Zr, Ta, Nb, Mo, W, Ni, Cr, Al, Zn, Si, Cu,ITO,AZO.TZO,WC,Nb2O5,TiO2, SiO2 with planar and rotary type.,
2.Typical alloy target :
1) Ti/Al alloy target (67:33,50:50at%)
2) W/Ti alloy target (90:10wt%),
3) Ni/V alloy target (93:7,wt%)
4) Ni/Cr alloy target (80:20, 70:30,wt%),
5) Al/Cr alloy target (70:30,50:50at%)
6) Nb/Zr alloy target (97:3,90:10wt%
7) Si/Al alloy target (90:10,95:5,98:2,70:30,wt%)
8) Zn/Al alloy
9)Pure Cr target (99.95%, 99.995%)
10)Al/Cr alloy target (70:30, 50:50at%)
11) Ni/Cu alloy target (70:30,80:20,wt%)
12)Al/Nd alloy target (98:2wt%)
13)Mo/Nb alloy target (90:10,wt%)
14)TiAlSi alloy target (Ti/Al/Si=30/60/10, 33/67, 40/50/10 ,wt% and at%)
15)CrAlSi alloy target (Cr/Al/Si=30/60/10 ,wt% and at%)and so on, and help set of target material
2.Our Sputtering Target Products :
Materials | Type | Product | Shape |
ceramic | Si | silicon sputtering target | rotarable |
NbOx | Niobium Oxide sputtering target | rotarable | |
TiOx | Titanium Oxide sputtering target | rotarable | |
AZO | Alumina doped zinc oxide sputtering target | rotarable/ planar | |
ITO | Indium Tin Oxide sputtering target | rotarable | |
metal | Mo | Molybdenum sputtering target | rotarable/ planar |
Cr | Cr Rotary Sputtering target | rotarable | |
Sn | Stannum sputterig target | rotarable | |
alloy | SiAl | SiAl sputtering target | rotarable |
NiCr | Nickle chromium sputtering target | rotarable/ planar | |
ZnSn | Zinc Stannum sputtering target | rotarable | |
ZnAl | Zinc Aluminum sputtering target | rotarable | |
CuInGa | CuInGa sputtering target | rotarable |