Audited Supplier
Plasma Cleaning Machine Model HTM-6046
- Equipment Use
2. Main Technical Parameters
2.2 UPH (Units Per Hour): 540-1080 (varies with the number of channels)
2.3 Cleanable Product Size Range: L≤300mm, W:28.8-100mm, T:0.1-2mm
2.4 Water Contact Angle: ≤15°
2.5 Control Method: PC + PLC control
2.6 Conveyor Track Adjustment: One-button full automatic
2.7 RF Power Supply: 13.56MHz (imported/ domestic) 0-1000w adjustable
2.8 Vacuum Pump: Dry pump (imported) 600L/min 1mbar
2.9 Components: Well-known domestic and foreign brands
2.10 Cleanroom Class: M350 (Class 10,000)
2.11 Main Power Specification: 220VAC±10%, 50Hz, 32A
2.12 Process Gases: Compressed air 20L/min, N2: 20L/min, Ar:1L/min
2.13 Working Air Pressure: 0.4-0.6MPa φ8mm
2.14 Equipment Exhaust: PVC hose, inner diameter ø25, connected to the factory's exhaust system
3. Features
3.2 Wafer cleaning structure for significant cleaning effects;
3.3 Single-sided loading and unloading structure, no need to change the magazine, and cleaned products automatically return to the original magazine to prevent batch mixing;
3.4 Double cleaning tray structure, one for cleaning and one for preparation, increasing production efficiency;
3.5 One-button product change, all equipment parameters and settings are automatically loaded, no manual adjustment required;
3.6 Optional CIM&2D Mark Strip MAP function;
3.7 Multiple product safety designs to ensure no product deformation or damage;
3.8 Multiple equipment safety designs to ensure personal safety;
3.9 Modular design, international brand configuration, to ensure stable equipment operation;
3.10 Diversified product series to meet different customer needs and personalized customization.
FAQ
Q:Are you manufacturer or trading company ?
A:We are a professional manufacturer of large-scale research and production of semiconductor wet process equipment. We have a professional research and development team and production and assembly workshop, which can ensure quality and after-sales service.
Q:What is the width of the equipment ?
A:The width of the equipment is about two meters.
Q:How long is the warranty ?
A:The warranty period of our equipment is one year. One-step service, professional engineers to follow up to solve the problem.
Q:What is the packaging of the equipment like? What is the delivery method?
A:Standard export fumigation sign wooden box packing or delivery by land or sea.
Q:how to install and debug the equipment after its arrival ?
A:After the equipment is issued, we will arrange a senior installation and debugging team to the your company to complete the installation,debugging,training,etc.,and assist your company in the early mass production.
