CHF3
75-46-7
CHF3
200-872-4
Industrial Pure Air
Electronic Grade
Colorless Gas
N5.0
44L / 47L
32kg / 32kg
41.8 Bar
Diss 716
kaimei
Cylinder
44L / 47L 32kg / 32kg
Suzhou, China
2811299000
Product Description
Trifluoromethane:also known as trifluoromethane, is a colorless, odorless, nonconductive gas that is an ideal substitute for halides.
Product Specifications
Company Information
Jiangsu Kaimei Electronic Materials Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineeringservices to our customers in Chinaand worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers toprovide support, solutions and quality products that are innovative,reliable, and safe.Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4,
NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
Package Type







Product Specifications
Product Name | Trifluoromethane |
Type | CHF3 |
Purity | n5.0 |
Cylinder Spec | 44L / 47L |
Fill contens (20?C) | 32kg / 32kg |
Fill pressure (20?C,-5%) | 41.8 bar |
Valve type | DISS 716 |
Applications | Semiconductor: Plasma etching gas, used in plasma dry etching process, low-temperature refrigerant. |
Company Information
Jiangsu Kaimei Electronic Materials Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineeringservices to our customers in Chinaand worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers toprovide support, solutions and quality products that are innovative,reliable, and safe.Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4,
NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.
Package Type







