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Lab new design four evaporation source high vacuum evaporation coating equipment
OVERVIEW--THERMAL EVAPORATION
Thermal evaporation is a popular physical vapor deposition technique because of its simplicity. During this process, a material in a high-vacuum environment is heated to its evaporation point by joule heating of the resistive boat in which it is located. The vaporized molecules then travel from the source to the substrate where they nucleate together, forming a thin film coating. A wide variety of materials can be deposited using this technique such as aluminum, silver, nickel, chrome, magnesium, among many others.
This equipment is a four-source high-vacuum evaporation coater. The equipment adopts a front-opening door vacuum chamber design. In addition, the chamber is increased to 500mm.The distance between the sample stage and the evaporation source has a larger adjustment range, which can adapt to various evaporation needs. It avoids the sample being damaged by the high temperature of the evaporation source.
The chamber adopts an top sample stage, the sample stage can be rotated, heated and lifted, and all operations can be integrated and controlled through the touch screen.
The equipment vacuum system is a two-stage vacuum system composed of a two-stage rotary vane pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment.
The equipment is equipped with a pneumatic valve system.Through the automatic control of the operating system, the user can perform operations such as one-button vacuum pumping, non-stop take out and place sample, and complete shutdown from the touch screen.
The equipment is equipped with four sets of tungsten boat evaporation sources and water-cooled copper electrode. Each evaporation source supports a large current of 100A and a heating temperature of 1800ºC. It can realize multi-layer coating or mixed coating of multiple materials.
Specifications of thermal evaporation coater:
| Four source high vacuum evaporation coating equipment | ||||
| Sample stage | Size | Maximum support φ150mm samples | Height | Adjustable up and down 140mm |
| Evaporation source | Quantity | Tungsten Boat x4 | ||
| Vacuum chamber | Chamber size | φ325mm x 510mm | Observation window | Front φ100mm with shading plate |
| Chamber material | 304 stainless steel | Open method | Front door opening | |
| Film thickness control | Crystal oscillator type film thickness measuring instrument, optional multi-channel film thickness controller | |||
| Vacuum system | Backing pump | Two stage rotary vane pump | Pumping port | KF16 |
| Secondary pump | Turbomolecular pump | Pumping port | CF160 | |
| Vacuum measurement | Resistance + ionization Compound vacuum gauge | Exhaust rate | Mechanical pump 1.1L/s | |
| Ultimate vacuum | 1.0E-5Pa | Power supply | Molecular pump 600L/s | |
| Control system | PLC automatic control Operation interface: touch screen + operation panel | |||
| Others | Supply voltage | AC220V,50Hz | Overall size | 1000mm x 800mm x 1500mm |
| Total power | 10kW | Total Weight | 350kg | |
1. We have thermal evaporation coater with 1/2/3/4/8... evaporation sources, can evaporation metal and organic material
2. Chamber material: High purity quartz--- low vacuum, SS304 chamber-- high vacuum
3. Film thickness monitor is optional
4. Thermal evaporation, E-beam, magnetron sputtering in one machine is available
5. Different material of evaporation source is available
6. Customize thermal evaporation coater according to your process is available
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
WE WANT TO HEAR ABOUT YOUR PROCESS!
Please get in touch and we can collaborate on your project. When we work together, amazing things can happen. Your brilliant ideas with our innovative team will create the tool that will bring your research or production to the next level. We're looking forward to hearing from you.
